OOPIC Simulation of a Cylindrical Magnetron Glow Discharge

reportActive / Technical Report | Accession Number: ADA640100 | Open PDF

Abstract:

An Object Oriented Particle-in-Cell model of a plasma glow discharge in a cylindrical magnetron cleaning device has been developed to provide guidance in developing a novel in situ surface conditioning technique. The model tracks the trajectories of particles by solving the equations of motion and the electrostatic field equations. Simulation results are compared to experimental measurements obtained from a plasma probe at 3 axial positions along the substrate surface.

Author(s):
Johnson, Mark A. ; Yee, Fang ; Cipollo, Mick ; Truszkowsa, Krystyna ; Verboncoeur, John
Author Organization(s):
ARMY ARMAMENT RESEARCH DEVELOPMENT AND ENGINEERING CENTER WATERVLIET NY BENET LABS
Descriptive Note:
Final rept.
Supplementary Note:
Prepared in collaboration with the University of California, Berkeley, CA. The original document contains color images. DOI: 10.21236/ADA640100
Pagination:
0009

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release; Distribution Is Unlimited.

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
ARAEW-TR-08003
Monitor Series:
ARCCB/BL
 Subject Terms
Joint Capability Areas:
JCA_6.4.1_Secure Information Exchange; JCA_3.2_Engagement; JCA_3_Force Application; JCA_5_Command and Control; JCA_1_Force Support; JCA_4.6_Engineering; JCA_6.4_Information Assurance; JCA_6_Net Centric; JCA_8_Building Partnerships
Modernization Areas:
Quantum Science and Computing
Communities of Interest:
Energy and Power Technologies
Descriptor(s):
*GLOW DISCHARGES, *SURFACE FINISHING, ELECTROSTATIC FIELDS, MAGNETRONS, MATHEMATICAL MODELS, PARTICLE IN CELL
Field(s)/Group(s):
Operations Research, Machinery and Tools, Plasma Physics and Magnetohydrodynamics
Keyword(s):
CMS(CYLINDRICAL MAGNETRON SPUTTERING), OOPIC(OBJECT ORIENTED PARTICLE IN CELL), PCD(PLASMA CLEANING DEVICE), PLASMA CLEANING TECHNIQUES
Report Date:
2008 Mar 01
Creation Date:
2016 Nov 28