%PDF-1.4
%
1 0 obj
<<
/AcroForm 2 0 R
/Metadata 3 0 R
/OCProperties <<
/D <<
/Order []
/RBGroups []
>>
/OCGs [4 0 R]
>>
/Pages 5 0 R
/Type /Catalog
/Version /1.7
>>
endobj
6 0 obj
<<
/CreationDate (D:20211203172047-05'00')
/Creator (PD4ML. HTML to PDF Converter for Java \(3100.PRPC.1\))
/ModDate (D:20211215171740-05'00')
/Producer (PD4ML. HTML to PDF Converter for Java \(3100.PRPC.1\))
/Author (Sitar, Zlatko;Irving, Douglas;LeBeau, James)
/Keywords (power electronics;semiconductors;fermi levels;energy bands;measurement;solid state physics;band structures;materials;chemistry;electronics laboratories;conduction bands;crystals;electrons;optical properties;point defects;quantum wells;wide bandgap semiconductors)
/Subject (We demonstrate Si-implanted AlN with high conductivity \(>1 Omega-1cm-1\) and high carrier concentration \(5x1018 cm-3\). This was enabled by Si-implantation into AlN with low TDD \(<103 cm-2\), a non-equilibrium damage recovery and dopant activation annealing process, and in situ suppression of self-compensation during the annealing. Low TDD and active suppression of VAl-nSiAl complexes via defect quasi Fermi level \(dQFL\) control enabled low compensation, while low-temperature, non-equilibrium annealing maintained the desired shallow donor state with an ionization energy of approx.70 meV. The achieved n-type conductivity and carrier concentration are over one order of magnitude higher than reported thus far and present a major technological breakthrough in doping of AlN. Contrary to the established understanding, we find that Ge in AlGaN does not suffer from the DX transition; instead, it undergoes a shallow donor \(30 meV\) to deep donor \(150 meV\) transition at approx. 50% Al content in the alloy. This finding is of profound technological importance as it removes fundamental doping limitations in AlGaN and AlN imposed by the presumed DX-1 acceptor state.)
/Title (Overcoming the DX Doping Challenge in Ultra Wide Bandgap Semiconductors)
/Filename (/pdf/TRECMS/AD1155204.pdf)
>>
endobj
2 0 obj
<<
/DA (/Helv 0 Tf 0 g )
/DR <<
/Encoding <<
/PDFDocEncoding 7 0 R
>>
/Font <<
/Helv 8 0 R
/ZaDb 9 0 R
>>
>>
/Fields []
>>
endobj
3 0 obj
<<
/Length 3228
/Subtype /XML
/Type /Metadata
>>
stream
2021-12-03T17:20:47-05:00
PD4ML. HTML to PDF Converter for Java (3100.PRPC.1)
2021-12-15T17:17:40-05:00
2021-12-15T17:17:40-05:00
PD4ML. HTML to PDF Converter for Java (3100.PRPC.1)
application/pdf
uuid:1110e02a-9f08-415c-bf65-8ea607753c0c
uuid:3ce99c9a-a074-4103-adc1-83eebc5f42c7
endstream
endobj
4 0 obj
<<
/Name (Headers/Footers)
/Type /OCG
/Usage <<
/PageElement <<
/Subtype /HF
>>
>>
>>
endobj
5 0 obj
<<
/Type /Pages
/Kids [10 0 R 11 0 R 12 0 R 13 0 R 14 0 R 15 0 R 16 0 R 17 0 R 18 0 R 19 0 R
20 0 R 21 0 R 22 0 R 23 0 R 24 0 R 25 0 R 26 0 R 27 0 R 28 0 R 29 0 R
30 0 R 31 0 R]
/Count 22
>>
endobj
7 0 obj
<<
/Differences [24 /breve /caron /circumflex /dotaccent /hungarumlaut /ogonek /ring /tilde 39
/quotesingle 96 /grave 128 /bullet /dagger /daggerdbl /ellipsis /emdash /endash
/florin /fraction /guilsinglleft /guilsinglright /minus /perthousand /quotedblbase /quotedblleft /quotedblright /quoteleft
/quoteright /quotesinglbase /trademark /fi /fl /Lslash /OE /Scaron /Ydieresis /Zcaron
/dotlessi /lslash /oe /scaron /zcaron 160 /Euro 164 /currency 166
/brokenbar 168 /dieresis /copyright /ordfeminine 172 /logicalnot /.notdef /registered /macron
/degree /plusminus /twosuperior /threesuperior /acute /mu 183 /periodcentered /cedilla /onesuperior
/ordmasculine 188 /onequarter /onehalf /threequarters 192 /Agrave /Aacute /Acircumflex /Atilde
/Adieresis /Aring /AE /Ccedilla /Egrave /Eacute /Ecircumflex /Edieresis /Igrave /Iacute
/Icircumflex /Idieresis /Eth /Ntilde /Ograve /Oacute /Ocircumflex /Otilde /Odieresis /multiply
/Oslash /Ugrave /Uacute /Ucircumflex /Udieresis /Yacute /Thorn /germandbls /agrave /aacute
/acircumflex /atilde /adieresis /aring /ae /ccedilla /egrave /eacute /ecircumflex /edieresis
/igrave /iacute /icircumflex /idieresis /eth /ntilde /ograve /oacute /ocircumflex /otilde
/odieresis /divide /oslash /ugrave /uacute /ucircumflex /udieresis /yacute /thorn /ydieresis]
/Type /Encoding
>>
endobj
8 0 obj
<<
/BaseFont /Helvetica
/Encoding 7 0 R
/Name /Helv
/Subtype /Type1
/Type /Font
>>
endobj
9 0 obj
<<
/BaseFont /ZapfDingbats
/Name /ZaDb
/Subtype /Type1
/Type /Font
>>
endobj
10 0 obj
<<
/Annots []
/Contents 32 0 R
/CropBox [0.0 0.0 595.0 842.0]
/Group 33 0 R
/MediaBox [0.0 0.0 595.0 842.0]
/Parent 5 0 R
/Resources <<
/ExtGState <<
/GS0 34 0 R
>>
/Font <<
/T1_0 35 0 R
/T1_1 36 0 R
>>
/ProcSet [/PDF /Text /ImageC]
/XObject <<
/Fm0 37 0 R
/Im0 38 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
11 0 obj
<<
/Annots []
/Contents 39 0 R
/CropBox [0.0 0.0 595.0 842.0]
/Group 40 0 R
/MediaBox [0.0 0.0 595.0 842.0]
/Parent 5 0 R
/Resources <<
/ExtGState <<
/GS0 41 0 R
>>
/Font <<
/T1_0 42 0 R
/T1_1 43 0 R
/T1_2 44 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 45 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
12 0 obj
<<
/Contents 46 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 48 0 R
>>
/Font <<
/TT0 49 0 R
/TT1 50 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 51 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
13 0 obj
<<
/Contents 52 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 54 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 49 0 R
/TT2 55 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 56 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
14 0 obj
<<
/Contents 57 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS10 [/ICCBased 47 0 R]
/CS11 [/ICCBased 47 0 R]
/CS12 [/ICCBased 47 0 R]
/CS13 [/ICCBased 47 0 R]
/CS14 [/ICCBased 47 0 R]
/CS15 [/ICCBased 47 0 R]
/CS16 [/ICCBased 47 0 R]
/CS17 [/ICCBased 47 0 R]
/CS18 [/ICCBased 47 0 R]
/CS19 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
/CS20 [/ICCBased 47 0 R]
/CS21 [/ICCBased 47 0 R]
/CS22 [/ICCBased 47 0 R]
/CS23 [/ICCBased 47 0 R]
/CS24 [/ICCBased 47 0 R]
/CS25 [/ICCBased 47 0 R]
/CS26 [/ICCBased 47 0 R]
/CS27 [/ICCBased 47 0 R]
/CS28 [/ICCBased 47 0 R]
/CS29 [/ICCBased 47 0 R]
/CS3 [/ICCBased 47 0 R]
/CS30 [/ICCBased 47 0 R]
/CS31 [/ICCBased 47 0 R]
/CS32 [/ICCBased 47 0 R]
/CS4 [/ICCBased 47 0 R]
/CS5 [/ICCBased 47 0 R]
/CS6 [/ICCBased 47 0 R]
/CS7 [/ICCBased 47 0 R]
/CS8 [/ICCBased 47 0 R]
/CS9 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 58 0 R
/GS2 59 0 R
/GS3 60 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 49 0 R
/TT2 55 0 R
/TT3 61 0 R
/TT4 62 0 R
/TT5 63 0 R
/TT6 64 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 65 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
15 0 obj
<<
/Contents 66 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 58 0 R
/GS2 67 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 61 0 R
/TT2 68 0 R
/TT3 63 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 69 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
16 0 obj
<<
/Contents 70 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
/CS3 [/ICCBased 47 0 R]
/CS4 [/ICCBased 47 0 R]
/CS5 [/ICCBased 47 0 R]
/CS6 [/ICCBased 47 0 R]
/CS7 [/Indexed [/ICCBased 47 0 R]
255 ]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 71 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 62 0 R
/TT2 63 0 R
/TT3 61 0 R
/TT4 64 0 R
/TT5 72 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageI]
/XObject <<
/Fm0 73 0 R
/Im0 74 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
17 0 obj
<<
/Contents 75 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS10 [/ICCBased 47 0 R]
/CS11 [/ICCBased 47 0 R]
/CS12 [/ICCBased 47 0 R]
/CS13 [/ICCBased 47 0 R]
/CS14 [/ICCBased 47 0 R]
/CS15 [/ICCBased 47 0 R]
/CS16 [/ICCBased 47 0 R]
/CS17 [/ICCBased 47 0 R]
/CS18 [/ICCBased 47 0 R]
/CS19 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
/CS20 [/ICCBased 47 0 R]
/CS21 [/ICCBased 47 0 R]
/CS22 [/ICCBased 47 0 R]
/CS23 [/ICCBased 47 0 R]
/CS24 [/ICCBased 47 0 R]
/CS25 [/ICCBased 47 0 R]
/CS26 [/ICCBased 47 0 R]
/CS27 [/ICCBased 47 0 R]
/CS28 [/ICCBased 47 0 R]
/CS29 [/ICCBased 47 0 R]
/CS3 [/ICCBased 47 0 R]
/CS30 [/ICCBased 47 0 R]
/CS31 [/ICCBased 47 0 R]
/CS32 [/ICCBased 47 0 R]
/CS33 [/ICCBased 47 0 R]
/CS34 [/ICCBased 47 0 R]
/CS35 [/ICCBased 47 0 R]
/CS36 [/ICCBased 47 0 R]
/CS37 [/ICCBased 47 0 R]
/CS38 [/ICCBased 47 0 R]
/CS39 [/ICCBased 47 0 R]
/CS4 [/ICCBased 47 0 R]
/CS40 [/ICCBased 47 0 R]
/CS41 [/ICCBased 47 0 R]
/CS42 [/ICCBased 47 0 R]
/CS43 [/ICCBased 47 0 R]
/CS44 [/ICCBased 47 0 R]
/CS45 [/ICCBased 47 0 R]
/CS46 [/ICCBased 47 0 R]
/CS47 [/ICCBased 47 0 R]
/CS48 [/ICCBased 47 0 R]
/CS49 [/ICCBased 47 0 R]
/CS5 [/ICCBased 47 0 R]
/CS50 [/ICCBased 47 0 R]
/CS51 [/ICCBased 47 0 R]
/CS52 [/ICCBased 47 0 R]
/CS53 [/ICCBased 47 0 R]
/CS54 [/ICCBased 47 0 R]
/CS55 [/ICCBased 47 0 R]
/CS56 [/ICCBased 47 0 R]
/CS57 [/ICCBased 47 0 R]
/CS58 [/ICCBased 47 0 R]
/CS59 [/ICCBased 47 0 R]
/CS6 [/ICCBased 47 0 R]
/CS60 [/ICCBased 47 0 R]
/CS61 [/ICCBased 47 0 R]
/CS62 [/ICCBased 47 0 R]
/CS63 [/ICCBased 47 0 R]
/CS64 [/ICCBased 47 0 R]
/CS65 [/ICCBased 47 0 R]
/CS66 [/ICCBased 47 0 R]
/CS67 [/ICCBased 47 0 R]
/CS68 [/ICCBased 47 0 R]
/CS69 [/ICCBased 47 0 R]
/CS7 [/ICCBased 47 0 R]
/CS70 [/ICCBased 47 0 R]
/CS71 [/ICCBased 47 0 R]
/CS72 [/ICCBased 47 0 R]
/CS8 [/ICCBased 47 0 R]
/CS9 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 58 0 R
/GS2 76 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 64 0 R
/TT2 61 0 R
/TT3 68 0 R
/TT4 63 0 R
>>
/ProcSet [/PDF /Text /ImageC]
/XObject <<
/Fm0 77 0 R
/Im0 78 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
18 0 obj
<<
/Contents 79 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 58 0 R
/GS2 80 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 63 0 R
/TT2 61 0 R
/TT3 68 0 R
/TT4 81 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 82 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
19 0 obj
<<
/Contents 83 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 84 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 81 0 R
/TT2 55 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 85 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
20 0 obj
<<
/Contents 86 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 58 0 R
/GS2 87 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 55 0 R
/TT2 61 0 R
/TT3 88 0 R
/TT4 68 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 89 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
21 0 obj
<<
/Contents 90 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 58 0 R
/GS2 91 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 88 0 R
/TT2 61 0 R
/TT3 64 0 R
/TT4 68 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 92 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
22 0 obj
<<
/Contents 93 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 58 0 R
/GS2 94 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 88 0 R
/TT2 61 0 R
/TT3 68 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 95 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
23 0 obj
<<
/Contents 96 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
/CS3 [/Indexed [/ICCBased 47 0 R]
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
>>
/ExtGState <<
/GS0 53 0 R
/GS1 97 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 49 0 R
/TT2 88 0 R
/TT3 64 0 R
/TT4 98 0 R
/TT5 99 0 R
/TT6 100 0 R
/TT7 101 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageI]
/XObject <<
/Fm0 102 0 R
/Im0 103 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
24 0 obj
<<
/Contents 104 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
/CS3 [/Indexed [/ICCBased 47 0 R]
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
>>
/ExtGState <<
/GS0 53 0 R
/GS1 105 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 88 0 R
/TT2 49 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageI]
/XObject <<
/Fm0 106 0 R
/Im0 107 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
25 0 obj
<<
/Contents 108 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
/CS3 [/Indexed [/ICCBased 47 0 R]
255 <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>]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 109 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 49 0 R
/TT2 68 0 R
/TT3 88 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageI]
/XObject <<
/Fm0 110 0 R
/Im0 111 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
26 0 obj
<<
/Contents 112 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
/CS3 [/Indexed [/ICCBased 47 0 R]
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
>>
/ExtGState <<
/GS0 53 0 R
/GS1 58 0 R
/GS2 113 0 R
/GS3 114 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 49 0 R
/TT2 115 0 R
/TT3 68 0 R
/TT4 88 0 R
/TT5 61 0 R
>>
/ProcSet [/PDF /Text /ImageC /ImageI]
/XObject <<
/Fm0 116 0 R
/Im0 117 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
27 0 obj
<<
/Contents 118 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 58 0 R
/GS2 119 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 61 0 R
/TT2 81 0 R
/TT3 64 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 120 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
28 0 obj
<<
/Contents 121 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 122 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 81 0 R
/TT2 68 0 R
/TT3 64 0 R
/TT4 123 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 124 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
29 0 obj
<<
/Contents 125 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 126 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 81 0 R
/TT2 55 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 127 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
30 0 obj
<<
/Contents 128 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 129 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 55 0 R
/TT2 81 0 R
/TT3 88 0 R
/TT4 123 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 130 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
31 0 obj
<<
/Contents 131 0 R
/CropBox [0.0 0.0 612.0 792.0]
/MediaBox [0.0 0.0 612.0 792.0]
/Parent 5 0 R
/Resources <<
/ColorSpace <<
/CS0 [/ICCBased 47 0 R]
/CS1 [/ICCBased 47 0 R]
/CS2 [/ICCBased 47 0 R]
>>
/ExtGState <<
/GS0 53 0 R
/GS1 132 0 R
>>
/Font <<
/TT0 50 0 R
/TT1 81 0 R
/TT2 88 0 R
>>
/ProcSet [/PDF /Text]
/XObject <<
/Fm0 133 0 R
>>
>>
/Rotate 0
/Type /Page
>>
endobj
32 0 obj
<<
/Length 821
/Filter /FlateDecode
>>
stream
HUmo6_q!HJ|PPpURm_FnJd'H `@Hs_F?h.SB QyA
FRPlKa2Q(%K9q,I"D\)Y6a6]yxeryHxWLJ5Q@X<J9QIâDbT8!8|6q[YEs~0%(#b[b=s}d
HFIy:Ľj}n]wsK{SXp
\ם7pV.Lژv몶Y=T]=KڙCq2
֦o-yy,_g2+'pLbV. θn)rf'˫sX+Iu2w&sF+w?^Z%dM#W9:u}*vYT
(WxV⺜-
c[{\ۀ|ծ`z=ծB5{K^I1W1Ze8=yՌh% RSO
Iz=Wd\0ETؒj_6$N=% ֜
i/!Xd}"cg's,T塒J_