Equipment for the Fabrication of Nanoscale Devices

The direct integration of electrical devices and biological systems remains a grand challenge in modern science and medicine. Recently, field effect transistors from graphene have emerged as platforms for probing biological systems, such as living cells and tissues. Graphene represents an ideal material for these studies due to its superior electrical, physical, chemical, and mechanical properties. However, electrically interfacing with biological or physiological systems across multiple relevant length scales (from nanometers to micrometers to centimeters) requires the fabrication of massively parallel arrays of nanoscale graphene-based transistors. The manufacture of such arrays necessitates the acquisition of a glove box-integrated electron beam physical vapor deposition system. We propose the acquisition of this commercial instrument, thereby paving the way for our research on bioelectronic devices.