Two-Photon Laser Micro-Nano Fabrication; Understanding from Single-Voxel Level

reportActive / Technical Report | Accession Number: ADP014231 | Open PDF

Abstract:

For laser nanofabrication using two-photon photopolymerization a deep understanding of the nature of focal spots that are related to two-photon excitation is essential for achieving a high spatial resolution in three dimensions. Here we report the use of a technology we call ascending scan for characterizing the three-dimensional size and shape of single polymerization elements voxels and introduce several features of voxels that have not been fully noticed before. These findings are important for tailoring nanofeatures according to design.

Author(s):
Kawata, Satoshi ; Sun, Hong-bo
Author Organization(s):
OSAKA UNIV (JAPAN) DEPT OF APPLIED PHYSICS
Descriptive Note:
Conference proceedings
Supplementary Note:
This article is from the Mat. Res. Soc. Symp. Proc. Vol. 758 p163-168, 2003. Prepared in cooperation with Institute of Physical and Chemical Research (RIKEN), Japan; PRESTO, Japan Science and Technology Corporation (JST). This article is from ADA417756 Materials Research Society Symposium Proceedings, Volume 758 Held in Boston, Massachusetts on December 3-5, 2002. Rapid Prototyping Technologies
Pagination:
0008

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Contract/Grant Number(s):
N00014-02-1-0820
Monitor Series:
ONR
 Subject Terms
Modernization Areas:
Microelectronics
Communities of Interest:
Energy and Power Technologies
Descriptor(s):
*FABRICATION, *LASER APPLICATIONS, *NANOTECHNOLOGY, SPATIAL DISTRIBUTION, SYMPOSIA, PHOTOCHEMICAL REACTIONS, EXCITATION, POLYMERIZATION, HIGH RESOLUTION, JAPAN, THREE DIMENSIONAL, PHOTONS
Field(s)/Group(s):
Polymer Chemistry, Laminates and Composite Materials
Keyword(s):
*TWO PHOTON PHOTOPOLYMERIZATION, *VOXELS, *MICROFABRICATION, COMPONENT REPORT, FOREIGN REPORTS, RAPID PROTOTYPING
Report Date:
2003 Apr 01
Creation Date:
2003 Nov 19