Comparison of CPM, PDS and Optical Transmittance of Amorphous Carbon Nitride Films Made by a Nitrogen Radical Sputter Method

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Abstract:

Amorphous carbon nitride films a-CNx, deposited in our laboratory by a radical sputter method, show high photosensitivity Ps, where Ps is the ratio of photoconductivity sigmap and dark-electrical conductivity omegad-Cid A-CNx made a layer-by-layer method, LLa-CNx, has the highest photosensitivity in our various preparation conditions. The photoconductivity in a- CNx and LLa-CNx shows dependence on photon energy in the range 2 eV to 6.2 eV. The constant photocurrent method CPM, photothermal deflection spectroscopy PDS and optical transmittance spectra are used to obtain the information in the optical energy band gap and defect states, A-CNx and LLa-CNx are good photoconductors especially at energy higher than 3 eV. Therefore it is not difficult to obtain CPM spectra in the high photon energy region. CPM spectra are obtained by dc- and ac- measurements. The value of the absorption coefficient a spectra obtained by dc-CPM is larger than that of ac-CPM, which increases with increasing frequency of the measurement. In this paper, CPM data is used to discuss a model of density of states DOS of a-CNx by comparison with PDS and optical transmittance spectra.

Author(s):
Katsuno, Takashi ; Nitta, Shoji ; Habuchi, Hitoe
Author Organization(s):
GIFU UNIV (JAPAN) DEPT OF ELECTRICAL AND ELECTRONIC ENGINEERING
Descriptive Note:
Proceedings
Supplementary Note:
Pres: Materials Research Society Symp. Proc., v675 pW12.3.1-W12.3.6, 2001. This article is from ADA401251 Materials Research Society Symposium Proceedings. Volume 675. Nanotubes, Fullerenes, Nanostructured and Disordered Carbon. Symposium Held April 17-20, 2001, San Francisco, California, U.S.A.
Pagination:
0006

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Monitor Series:
X5
 Subject Terms
Joint Capability Areas:
JCA_6.3.3_Spectrum Management; JCA_6_Net Centric; JCA_6.3_Net Management; JCA_1_Force Support
Modernization Areas:
Microelectronics
Communities of Interest:
Advanced Electronics
Descriptor(s):
*PHOTOCHEMICAL REACTIONS, OPTICAL PROPERTIES, SYMPOSIA, THIN FILMS, AMORPHOUS MATERIALS, FULLERENES, CARBON, JAPAN, LIGHT TRANSMISSION, PHOTOCONDUCTIVITY, PHOTOELECTRICITY, PHOTOTHERMAL PROPERTIES
Field(s)/Group(s):
Radiation and Nuclear Chemistry, Electricity and Magnetism
Keyword(s):
COMPONENT REPORTS, FOREIGN REPORTS, CARBON NITRIDE FILMS, CPM(CONSTANT PHOTOCURRENT METHOD), OPTICAL TRANSMITTANCE
Report Date:
2001 Apr 01
Creation Date:
2002 May 22