MEMS-Based Research in Integrated Monitoring and Actuation at Case Western Reserve University

The paper discusses the development of MEMS at CWRU for the active monitoring and control of systems or structures. The ultimate objective is the realization of high density array architectures of microfabricated sensors and actuators for distributed monitoring and control of a system, or its components. Our program addresses the research needs for the advancement of the technology toward realization of low cost, reliable, integrated sensoractuator devices and arrays capable of real time signal processing and control. Our program is also addressing the need for high-temperature MEMS required for use in many aerospace, automotive, and industrial process control applications. Toward this goal, we have research and development activities in high temperature sensors and actuators made from silicon carbide SiC, a wide bandgap semiconductor material capable of functioning in environments where the ambient temperature is well over 250 C, which is the limit of silicon devices. We are also investigating high-phase transformation temperature shape memory alloys as integrated actuation mechanisms suitable for various high temperature applications.