Low-Radiation-Damage Multilayer Coatings for the Soft X-Ray Region,

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Abstract:

Highly reflecting multilayer coatings MLC, used to form resonant cavities for some x-ray lasersl in which double- and triple-pass amplification occurs, can be destroyed by strong electric fields generated at the multilayer boundaries by intense soft x-ray radiation, rather than plasma debris from which the coatings are shielded. Any multilayer coating used in high field strength applications, FEL, x-ray projection lithography, etc., are subject to such damage. Electric field strengths can be reduced at the boundaries in MLCs by altering slightly the layer thicknesses of the final, or topmost, layers. Calculations are presented showing reduced field strengths caused by altering final layer thicknesses. The optical constants used in the calculations were obtained from Henke et al2 and Palik3 so similar computations may vary depending on the actual n,k values used but the basic concepts discussed herein are independent of the optical constants.

Author(s):
Hunter, W. R. ; Seely, J. F.
Author Organization(s):
SFA INC LANDOVER MD
Supplementary Note:
This article is from 'Physics of X-Ray Multilayer Structures' AD-A255 383, p165-168.
Pagination:
0004

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DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Monitor Series:
AFOSR
 Subject Terms
Communities of Interest:
No COI(s) Identified
Descriptor(s):
*COATINGS, *DAMAGE, *RADIATION, *SOFT X RAYS, *X RAY LASERS, *LOW RATE, AMPLIFICATION, BOUNDARIES, CAVITIES, CAVITY RESONATORS, COMPUTATIONS, CONSTANTS, DEBRIS, ELECTRIC FIELDS, LASERS, LAYERS, LITHOGRAPHY, VALUE, X RAYS, REFLECTIVITY, PLASMAS(PHYSICS), OPTICS, THICKNESS
Field(s)/Group(s):
Nuclear Physics and Elementary Particle Physics, Coatings, Colorants and Finishes, Radiation and Nuclear Chemistry, Optics
Keyword(s):
Component Reports, Multilayers
Report Date:
1992 Mar 05