Mask Aligner for Solar Cell Fabrication.

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Abstract:

A novel method and device for accurately aligning a substrate comprising a silicon wafer in the fabrication of a silicon vertical junction solar cell are described which comprise a base plate having a recess therein defining an opening for snugly receiving the wafer, the recess including a substantially straight portion for mating with a cleaved edge of known crystallographic orientation provided on the wafer, and a mask plate for covering the base plate and wafer, the mask including a pattern in predetermined configuration through which the wafer may be exposed in the fabrication process for the solar cell. Author

Author(s):
Hufford, D. K.
Author Organization(s):
DEPARTMENT OF THE AIR FORCE WASHINGTON DC
Descriptive Note:
Patent Application,
Pagination:
0011

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Availability: This Government-owned Invention Available For U.s. Licensing And, Possibly, For Foreign Licensing. Copy Of Application Available Ntis.

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
PAT-APPL-610 911
 Subject Terms
Communities of Interest:
Advanced Electronics
Descriptor(s):
*Patent applications, *Solar cells, *Wafers, *Alignment, Substrates, Silicon, Semiconductor junctions, Plates, Masks, Fabrication
Field(s)/Group(s):
Electric Power Production and Distribution
Report Date:
1984 May 16