Method of Vacuum Depositing Metallic and Nonmetallic Coating Onto a Substrate.

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Abstract:

Metallic and non metallic coatings are vacuum deposited onto a substrate using different deposition methods in a single vacuum deposition chamber without breaking vacuum between depositions. The deposition methods are RF sputter, electron beam gun evaporation, and chemical vapor deposition. The method allows for a multiple deposition of a large number of distinct and special coatings on various substrates to be accomplished without exposing the sensitive coatings to atmospheric poisoning. Author

Author(s):
Branovich, Louis E. ; Dubuske, Stanley ; Smith, Willis M. ; Daly, Edward
Author Organization(s):
DEPARTMENT OF THE ARMY WASHINGTON DC
Descriptive Note:
Patent Application,
Pagination:
0011

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Availability: This Government-owned Invention Available For U.s. Licensing And, Possibly, For Foreign Licensing. Copy Of Application Available Ntis.

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
PAT-APPL-315 276
 Subject Terms
Communities of Interest:
No COI(s) Identified
Descriptor(s):
*Patent applications, *Coatings, *Metal coatings, *Substrates, *Vacuum deposition, Nonmetals, Methodology, Sputtering, Evaporation, Vapor deposition, Multiple operation
Field(s)/Group(s):
Coatings, Colorants and Finishes
Report Date:
1981 Oct 26