Comparison of Commonly Used Excimer Laser Pulsed Power Circuitry

reportActive / Technical Report | Accession Number: ADA640191 | Open PDF

Abstract:

This paper compares the electrical characteristics of the various types of pulsed power circuits commonly used in commercial excimer lasers. Sixty watt commercial krypton fluoride lasers are used as the test cases, however the lasers are multigas devices operating on all the usual excimer transitions. Circuit measurements made on these lasers are presented and energy and charge transfer through the systems are discussed and analyzed. Subsequently these circuits are discussed with regard to more recent circuit techniques to assess design approaches for higher power excimer lasers.

Author(s):
Weeks, Robert W. ; Mckee, Terrence J.
Author Organization(s):
LUMONICS RESEARCH LTD OTTAWA (ONTARIO)
Supplementary Note:
See also ADM002371. 2013 IEEE Pulsed Power Conference, Digest of Technical Papers 1976-2013, and Abstracts of the 2013 IEEE International Conference on Plasma Science. Held in San Francisco, CA on 16-21 June 2013. U.S. Government or Federal Purpose Rights License.
Pagination:
0005

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release; Distribution Is Unlimited.

RECORD

Collection: TR
Identifying Numbers
Monitor Series:
X5
 Subject Terms
Modernization Areas:
Microelectronics
Communities of Interest:
Energy and Power Technologies
Descriptor(s):
*CIRCUITS, *EXCIMERS, *GAS LASERS, CAPACITORS, COMPARISON, ELECTRICAL PROPERTIES, MEASUREMENT, PULSES, SWITCHES, THYRATRONS, VOLTAGE
Field(s)/Group(s):
Electrical and Electronic Equipment, Lasers and Masers, Atomic and Molecular Physics and Spectroscopy
Keyword(s):
PULSED POWER CIRCUITRY, EXCIMER LASERS, KRYPTON FLUORIDE LASERS, LASER CIRCUITS
Report Date:
1987 Jun 01
Creation Date:
2016 Nov 28