Recent Advances in High-Resolution MEMS DM Fabrication and Integration

reportActive / Technical Report | Accession Number: ADA531832 | Open PDF

Abstract:

Deformable mirrors fabricated using microelectromechanical systems technology MEMS-DMs have been studied at Boston University BU and developedcommercialized by Boston Micromachines Corporation BMC over the past decade. Recent advances that might have an impact on surveillance telescopes include demonstration of 4092 actuator DMs with continuous mirror face-sheets, and segmented DMs capable of frame rates of greater than 20kHz for devices with up to 1020 independent segments. The 4092 actuator DM, developed by BMC for the Gemini Planet Imaging GPI instrument, was recently delivered to the GPI instrument development team. Its packaging and platform development are described, and the performance results for the latest prototype devices are presented.

Author(s):
Bifano, Thomas ; Cornelissen, Steven ; Bierden, Paul
Author Organization(s):
BOSTON UNIV MA
Descriptive Note:
Conference paper
Supplementary Note:
2010 Advanced Maui Optical and Space Surveillance Technologies Conference, 14-17 Sep 2010, Maui, HI. Sponsored in part by AFRL. U.S. Government or Federal Rights License. The original document contains color images.
Pagination:
0009

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release; Distribution Is Unlimited.

RECORD

Collection: TR
Identifying Numbers
Monitor Series:
XD
 Subject Terms
Modernization Areas:
Microelectronics
Communities of Interest:
Advanced Electronics
Descriptor(s):
*DEFORMABLE MIRRORS, FABRICATION, TELESCOPES, MICROELECTROMECHANICAL SYSTEMS, SYMPOSIA, PACKAGING
Field(s)/Group(s):
Astronomy, Optical Detection and Detectors
Report Date:
2010 Sep 01
Creation Date:
2010 Nov 24