Patterning of Thick Parylene Films by Oxygen Plasma for Application as Exploding Foil Initiator Flyer Material

reportActive / Technical Report | Accession Number: ADA506670 | Open PDF

Abstract:

Parylene is an attractive flyer material for the exploding foil initiator due to its superior conformal step coverage and inert properties. A process for patterning thick films of Parylene using a thin metal masking layer and oxygen plasma has been developed. Gold and titanium have been compared as masking materials on the basis of masking quality and compatibility with existing processes. Etch rate, directionality, and minimum feature size have been approximated for isotropic and anisotropic oxygen plasma etch recipes. Remaining obstacles to process integration are discussed.

Author(s):
Zakar, Eugene ; Grapes, Michael D.
Author Organization(s):
ARMY RESEARCH LAB ADELPHI MD SENSORS AND ELECTRON DEVICES DIRECTORATE
Descriptive Note:
Progress rept. Jun-Aug 2008
Supplementary Note:
The original document contains color images.
Pagination:
0024

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release; Distribution Is Unlimited.

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
ARL-TR-4956
Monitor Series:
ARDEC/ADELPH
 Subject Terms
Joint Capability Areas:
JCA_5_Command and Control; JCA_5.3_Planning
Modernization Areas:
Microelectronics
Communities of Interest:
Advanced Electronics
Descriptor(s):
*EXPLOSIVES INITIATORS, *OXYGEN, *PLASMAS(PHYSICS), *MICROELECTROMECHANICAL SYSTEMS, TITANIUM, FOILS(MATERIALS), INERT MATERIALS, GOLD, THICK FILMS, DETONATIONS, ISOTROPISM, ANISOTROPY, INTEGRATION, METALS, POLYMERS
Field(s)/Group(s):
Electrical and Electronic Equipment, Metallurgy and Metallography, Crystallography, Plasma Physics and Magnetohydrodynamics
Keyword(s):
*EXPLODING FOIL INITIATORS, *METAL MASKING MATERIALS, *PARYLENE, INERT PROPERTIES
Report Date:
2009 Sep 01
Creation Date:
2009 Oct 21