Recent Progress in Silicon Mems Oscillators

reportActive / Technical Report | Accession Number: ADA504079 | Open PDF

Abstract:

This paper first reviews key milestones in the making of silicon MEMS oscillators and how MEMS resonators can be used as frequency references for electronic systems, starting from silicon resonators device designs with different fabrication processes, to wafer level packaging technologies, to the robustness of volume manufacturing processes. Secondly, as final products, various MEMS oscillators from various companies are compared with quartz crystal oscillators in terms of jitter, power consumption, and temperature stability. Finally, to ensure the performance is good for real electronics applications, silicon MEMS oscillators not only have passed standard JEDEC reliability tests such as aging, solder reflow, thermal shock, and autoclave, but also have been demonstrated in several electronic systems.

Author(s):
Hsu, Wan-thai
Author Organization(s):
DISCERA INC ANN ARBOR MI
Descriptive Note:
Conference paper
Supplementary Note:
See also ADM002186. Presented at the Annual Precise Time and Time Interval Systems and Applications Meeting (40th) Held in Reston, Virginia on 1-4 December 2008, The original document contains color images.
Pagination:
0013

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release; Distribution Is Unlimited.

RECORD

Collection: TR
Identifying Numbers
Monitor Series:
XD
 Subject Terms
Joint Capability Areas:
JCA_6.3.3_Spectrum Management; JCA_6_Net Centric; JCA_1.3_Human Capital Management; JCA_1_Force Support; JCA_1.3.2_Personnel Management; JCA_8_Building Partnerships; JCA_6.3_Net Management; JCA_8.2_Shape
Communities of Interest:
No COI(s) Identified
Descriptor(s):
*RESONATORS, *OSCILLATORS, *SILICON, ELECTRONICS, SOURCES, METHODOLOGY, STABILITY, VIBRATION, INTEGRATED SYSTEMS, SYMPOSIA, MANUFACTURING, INTERFACES, ELECTRONIC EQUIPMENT, ACCURACY, FABRICATION, THERMAL STABILITY, CRYSTALS, RESONANT FREQUENCY, RELIABILITY, QUARTZ, MILITARY APPLICATIONS, PACKAGING, HUMAN BODY, FLOW, CIRCUITS, HEART RATE, BATCH PROCESSING, ENERGY CONSUMPTION, MECHANICAL COMPONENTS, THERMAL SHOCK, SOLDERING, JITTER, LOW POWER, CRYSTAL OSCILLATORS, TEST AND EVALUATION, FREQUENCY
Field(s)/Group(s):
Electrical and Electronic Equipment
Report Date:
2008 Dec 01
Creation Date:
2009 Sep 09