The MEMS Flux Concentrator: Potential Low-Cost, High-Sensitivity Magnetometer

reportActive / Technical Report | Accession Number: ADA481427 | Open PDF

Abstract:

Progress on the development of a device, the MEMS flux concentrator, for mitigating the problem of 1f noise in magnetic sensors will be presented. The MEMS flux concentrator essentially eliminates the effect of 1f noise by increasing the operating frequency of the sensor to a frequency region where 1f noise is small. This is accomplished by putting flux concentrators on MEMS structures whose motion modulates the magnetic field at the position of the magnetic sensor. Depending on the sensor, mitigating the effect of 1f noise will increase the sensitivity of magnetic sensors by one to three orders of magnitude. Combining the MEMS flux concentrator with magnetic tunnel junctions with MgO barriers should lead to low cost magnetic sensors that are able to detect 1 pT signals at 1 Hz.

Author(s):
Edelstein, Alan S. ; Fischer, Greg ; Bernard, William ; Nowak, Edmond ; Cheng, Shu Fan
Author Organization(s):
ARMY RESEARCH LAB ADELPHI MD
Descriptive Note:
Conference paper
Supplementary Note:
See also ADM002075. Presented at the Army Science Conference (25th) held in Orlando, FL on 27-30 November 2006. The original document contains color images.
Pagination:
0008

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release; Distribution Is Unlimited.

RECORD

Collection: TR
Identifying Numbers
Monitor Series:
DARPA
 Subject Terms
Joint Capability Areas:
JCA_1_Force Support; JCA_1.2_Force Preparation; JCA_1.2.6_Concepts; JCA_8_Building Partnerships; JCA_8.2_Shape; JCA_6.3.3_Spectrum Management; JCA_6_Net Centric
Modernization Areas:
Microelectronics
Communities of Interest:
Sensors
Descriptor(s):
*MAGNETOMETERS, *MICROELECTROMECHANICAL SYSTEMS, SYMPOSIA, LOW COSTS, SENSITIVITY, NOISE, SILICON ON INSULATOR, MAGNETIC DETECTORS, MAGNESIUM OXIDES, MAGNETORESISTANCE
Field(s)/Group(s):
Electrical and Electronic Equipment, Magnetic and Electric Field Detection and Detectors
Keyword(s):
COMPONENT REPORTS, DRIE(DEEP REACTIVE ION ETCHING), *FLUX CONCENTRATORS, MAGNETIC FLUX, MAGNETIC TUNNEL JUNCTIONS, SIGNAL MODULATION, SPIN VALVES
Report Date:
2006 Nov 01
Creation Date:
2008 Jun 04