Feasibility of Biodegradable MEMS based on Cellulose Paper

This report deals with the micro-patterning process of EAPap Electro-Active Paper for fabricating biodegradable and flexible MEMS. EAPap has been known as an active material with an interesting actuation phenomenon of papers. Such active materials were made by depositing very thin electrodes on both sides of cellulose paper strip. When an electric field is applied to the paper strip, a large displacement was produced. This active material has merits in terms of large strain, low voltage, low power consumption, dryness, cheap and biodegradable nature. This material can be designed in such a way that its advantages can be optimized. With these advantages and possibility, this material is attractive for biodegradable and flexible MEMS. This report illustrates a micro-patterning process on flexible EAPap material. Key issues in this biodegradable MEMS fabrication with EAPap are 1 the preparation of EAPap material for micro scale fabrication, 2 micro patterning possibility on EAPap and 3 functional capabilities of sensing and actuation. The micro contact printing for the micro-patterning on the EAPap flexible membrane is developed and its feasibility for biodegradable MEMS fabrication is investigated.