High-Cycle Life Testing of RF MEMS Switches

reportActive / Technical Report | Accession Number: ADA464840 | Open PDF

Abstract:

RF MEMS capacitive switches capable of order of-magnitude impedance changes have demonstrated operating lifetimes exceeding 100 billion switching cycles without failure. In situ monitoring of switch characteristics demonstrates no significant degradation in performance and quantifies the charging properties of the switch silicon dioxide film. This demonstration lends credence to the mechanical robustness of RF MEMS switches.

Author(s):
Goldsmith, C. L. ; Forehand, D. I. ; Peng, Z. ; Hwang, J. C.
Author Organization(s):
MEMTRONICS PLANO TX
Descriptive Note:
Conferenc paper
Supplementary Note:
Submitted for publication in the Proceedings of the IEEE MTT-S International Microwave Symposium (2007) to be held in Honolulu, HI on 3-8 Jun 2007.
Pagination:
0007

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release; Distribution Is Unlimited.

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
AFRL-SN-WP-TP-2007-102
Contract/Grant Number(s):
F33615-03-C-7003
Task Number(s):
ND
Project Number(s):
ARPS
Monitor Series:
TP-2007-102, AFRL-SN-WP
 Subject Terms
Joint Capability Areas:
JCA_5_Command and Control; JCA_5.2.3_Share Knowledge and Situational Awareness; JCA_5.2_Understand; JCA_1.2.3_Educating
Modernization Areas:
Microelectronics
Communities of Interest:
Advanced Electronics
Descriptor(s):
*VOLTAGE, *REDUCTION, *LIFE CYCLE TESTING, *MICROELECTROMECHANICAL SYSTEMS, *RADIOFREQUENCY, SYMPOSIA, SWITCHES, INSERTION LOSS, RELIABILITY, MONITORING
Field(s)/Group(s):
Electrical and Electronic Equipment, Manufacturing and Industrial Engineering and Control of Production Systems, Radiofrequency Wave Propagation
Keyword(s):
COMPONENT REPORTS, DIELECTRIC CHARGING, EP63739E, WUAFRLARPSNDAN
Report Date:
2006 Dec 01
Creation Date:
2007 Apr 25