Next Generation MEMS Design Tools

The objective for this project has been to lower the barriers to MEMS technology through the development of an integrated suite of CAD tools for mixed technology design. Tanner has achieved new levels of integration of layout, solid modeling, and finite element analysis for MEMS device design and verification. Tanner has developed a modeling tool that generates a solid model directly from the layout and a process description. Tanner has also developed a novel approach to MEMS device meshing, dramatically improving the efficiency of finite element analysis. System design tools developed include mixed technology schematic, simulation, place and route, extraction and design rule checking. These tools enable the design, physical layout, and validation of chips of mixed MEMSIC components. Simulation tools allow the use of a variety of models including C-code, Spice, and MATLAB, necessary for the design of mixed technology chips. A library of components contains a schematic, simulation, and layout representation of each device, and device layout may be synthesized from functional or geometric parameters. The tools have been demonstrated at a number of commercial and government sites, and are now in commercial release.