Materials Research Society Symposium Proceedigns, Volume 495. Chemical Aspects of Electronic Ceramics Processing.

This volume contains 65 papers from a symposium entitled Chemical Aspects of Electronic Ceramics Processing, held over four days at the 1997 MRS all Meeting in Boston. This symposium is the merger of two previously held symposia, Non- Oxide Ceramics and Metal Organic Chemical Vapor Deposition of Electronic Ceramics, both held twice before in the Fall of 1993 and the lall of 1995. The considerable overlap, between the two symposia, especially in the area of chemical vapor deposition of non-oxide electronic ceramics, suggested that combining the two would attract a wider audience without unduly sacrificing the focus of the symposium. The common themes in all of the research presented in this volume are the creative use of chemistry principles for ceramic fabrication and a multidisciplinary approach to materials research. Inorganic chemistry, solid-state chemistry, chemical engineering, materials science and engineering, and electrical engineering have all been skillfully combined to produce materials which will play an increasingly more important part in our lives. As in prior years, chemical vapor deposition CVD continues to be a popular area of research and was the subject of approximately half of the papers in this volume. Farticularly hot areas of research are new and improved precursors, delivery systems for low-vapor pressure precursors, and improved processing and materials properties. apers are evenly divided between oxide ceramics and non- oxide ceramics.