JPRS Report, Science & Technology, Japan, SOR Technology Update
Abstract:
The highlights of this report are a series of papers on such topics as superconducting compact storage rings, structure and manufacture of multilayers in synchrotron radiation, X-ray Stepper, X-ray Mask and Electron beam Lithography.
Security Markings
DOCUMENT & CONTEXTUAL SUMMARY
Distribution:
Approved For Public Release
RECORD
Collection: TR