Focused Ion Beam Workstation Facility.

reportActive / Technical Report | Accession Number: ADA308418 | Open PDF

Abstract:

An FEl Company 610 series, Focussed Ion Beam FIB instrumentation facility has been installed. This ultrahigh resolution nanoscale technology system can removedeposit material on submicron lateral and vertical scales, and allows precise lateral and vertical etchdeposition and cross sections of device features and structural defects that are either impossible of impractical by conventional cleaving or lapping techniques. Using gallium LMI technology, computer controlled positioning and ultrafine machining deposition, the FIB system can perform multiple cross sections on the same sample, expose subsurface nodes, form probe pads for electrical analysis, and prepare ultra precise samples for high resolution TEMSTEM. The research supported by this instrumentation concentrates on but is not limited to advanced electronic device manufacturing development. Additional, more general research areas include analysis of ceramic materials, titanium aluminide composites, ultra low temperature brazing alloy development, and molten metal-ceramic interactions.

Author(s):
Wood, William B.
Author Organization(s):
OREGON GRADUATE INST BEAVERTON DEPT OF MATERIALS SCIENCE AND ENGINEERING
Descriptive Note:
Final technical rept.,
Pagination:
0005

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
MSE102, ARO-33760.1-EL-RIP
Contract/Grant Number(s):
DAAH04-95-1-0031
Monitor Series:
33760.1-EL-RIP, ARO
 Subject Terms
Joint Capability Areas:
JCA_5_Command and Control; JCA_5.3_Planning
Modernization Areas:
Microelectronics
Communities of Interest:
No COI(s) Identified
Descriptor(s):
*ION BEAMS, CONTROL, POSITION(LOCATION), MACHINING, COMPUTERS, STRUCTURAL PROPERTIES, MATERIALS, COMPOSITE MATERIALS, FACILITIES, HIGH RESOLUTION, ETCHING, ELECTRICAL PROPERTIES, NODES, CERAMIC MATERIALS, DEPOSITION, DEPOSITS, DEFECTS(MATERIALS), VERTICAL ORIENTATION, SCALE, POSITION FINDING, CROSS SECTIONS, PRECISION, SAMPLING, TITANIUM ALUMINIDE, INSTRUMENTATION, GALLIUM, SUBSURFACE, ULTRAFINES
Field(s)/Group(s):
Particle Accelerators
Keyword(s):
MICROMACHINING, NANOSTRUCTURES, MICROMILLING
Report Date:
1996 Feb 01
Creation Date:
1996 Jun 25