Virtual Prototyping Tools for Semiconductor Fabrication Equipment.

This report documents the creation of a Virtual Prototyping software package under a Phase II SBIR study titled Virtual Prototyping Tools for Semiconductor Fabrication Equipment. The project successfully developed and integrated software tools from a variety of disciplines such as CADCAM, Fluid Dynamics, Graphics and Database Management Systems to form a design environment for semiconductor fabrication processesequipment. The resulting virtual prototyping environment provides the semiconductor industry with a tool for optimizing the design and operation of fabrication equipment to meet the rapidly increasing demands of the industry.