Pulsed Laser Deposition Improvements by Self-Directed Control.

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Abstract:

Improvements in material thin coatings for the year 2000 and beyond require a radical new approach to deposition processes. Pulsed Laser Deposition PLD is one such deposition process which offers deposition of complex materials currently not possible with other deposition methods. Unfortunately, it is not enough to control thin film material composition, but thin film stoichiometry, micro and macro stress and strain, and thickness as well. It is also desirable to have a deposition process that is easy to use and is repeatable. In order to propel the current thin film deposition culture into accepting PLD as a manufacturing process, the automation of PLD is inevitable. The inception, development, and implementation of PLD automation methods is the aim of this document.

Author(s):
Laube, Samuel J.
Author Organization(s):
FEDERAL ENERGY REGULATORY COMMISSION ATLANTA GA
Descriptive Note:
Interim rept. Jun 94-May 95,
Pagination:
0026

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
WL-TR-95-4079
Contract/Grant Number(s):
F33615-92-D-5000
Task Number(s):
04
Project Number(s):
4SU1
Monitor Series:
TR-95-4079, WL/WP
 Subject Terms
Joint Capability Areas:
JCA_5_Command and Control; JCA_5.3_Planning; JCA_1.2.5_Lessons Learned
Modernization Areas:
Directed Energy; Microelectronics
Communities of Interest:
Energy and Power Technologies
Descriptor(s):
*THIN FILMS, *PULSED LASERS, *VACUUM DEPOSITION, STRESS STRAIN RELATIONS, ABLATION, CONTROL SYSTEMS, AUTOMATION, REAL TIME, INDUSTRIAL PRODUCTION, RAMAN SPECTROSCOPY, GRAPHITE, CARBON, CHEMICAL COMPOSITION, COATINGS, PRODUCTION CONTROL, EMISSION SPECTROSCOPY, COMPUTER AIDED MANUFACTURING, QUALITY ASSURANCE, ELECTRON SPECTROSCOPY, STOICHIOMETRY, ION DENSITY, POLYCRYSTALLINE, ULTRAVIOLET LASERS
Field(s)/Group(s):
Lasers and Masers, Manufacturing and Industrial Engineering and Control of Production Systems, Coatings, Colorants and Finishes
Keyword(s):
PLD(PULSED LASER DEPOSITION), DLC(DIAMOND LIKE CARBON), PE63215C, WUWL4SU10457
Report Date:
1995 May 01