Use of D2 to Elucidate OMVPE Growth Mechanisms.

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Abstract:

The research concentrated on two important areas of organometallic vapor phase epitaxial growth 1 A study of the pyrolysis reactions and rates for five new antimony precursors trivinylantimony TVSb, triisopropylantimony TIPSb, triallylantimony TASb, tertiary- butyldimethyl-antimony TBDMSb, and diisopropylantimonyhydride DIPSbH. They have been compared with the standard precursor, trimethylantimony TMSb. The pyrolysis temperatures for TIPSb, TASb, TBDMSb, and DIPSbH are all much lower than for TVSb, which is similar to TMSb. The pyrolysis mechanisms are surprisingly dissimilar. 2 The effect of adding tertiarybutyl radicals from azo-t-butane pyrolysis on the low temperature growth of GaAs using trimethylgallium TMGa and arsine. The pyrolysis of both precursors is stimulated by t-butyl radicals. The growth rate at 450 deg C is found to be enhanced by a factor of 6, giving good morphology layers. The properties of the layers were studied using X-ray diffraction, photoluminescence, and Raman spectroscopy. jg

Author(s):
Stringfellow, Gerald B.
Author Organization(s):
UTAH UNIV SALT LAKE CITY
Descriptive Note:
Final rept. 1 Dec 90-1 May 94,
Pagination:
0010

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
AFOSR-TR-95-0278
Contract/Grant Number(s):
AFOSR-91-0059
Task Number(s):
AS
Project Number(s):
2305
Monitor Series:
TR-95-0278, AFOSR
 Subject Terms
Modernization Areas:
Microelectronics
Communities of Interest:
Advanced Electronics
Descriptor(s):
*ORGANOMETALLIC COMPOUNDS, *EPITAXIAL GROWTH, *VAPOR PHASES, *ANTIMONY COMPOUNDS, TEMPERATURE, LOW TEMPERATURE, HYDRIDES, METHYL RADICALS, LAYERS, PRECURSORS, GALLIUM ARSENIDES, PHOTOLUMINESCENCE, RAMAN SPECTROSCOPY, MORPHOLOGY, X RAY DIFFRACTION, RATES, DEUTERIUM, ARSINES, PYROLYSIS, ALKYL RADICALS
Field(s)/Group(s):
Organic Chemistry, Inorganic Chemistry, Physical Chemistry, Atomic and Molecular Physics and Spectroscopy, Optics
Keyword(s):
TVSB(TRIVINYLANTIMONY), TRIVINYLANTIMONY, TIPSB(TRIISOPROPYLANTIMONY), TRIISOPROPYLANTIMONY, TASB(TRIALLYLANTIMONY), TRIALLYLANTIMONY, TBDDMSB(TERTIARY BUTYLDIMETHYLANTIMONY), TERTIARY BUTYLDIMETHYLANTIMONY, DIPSBH(DIISOPROPYLANTIMONYHYDRIDE), DIISOPROPYLANTIMONYHYDRIDE, OMVPE(ORGANOMETALLIC VAPOR PHASE EPITAXY), AZO T BUTANE, PE61102F, WUAFOSR2305AS
Report Date:
1994 May 01