Thickness Distribution Measurement of Thin Films.

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Abstract:

Two calculated methods of film thickness of non cosine distribution and two measuring methods based on Fabry-Perot metal dielectric filters were presented. Some calculations and measurements were shown. AN

Author(s):
Gu, Peifu
Author Organization(s):
NATIONAL AIR INTELLIGENCE CENTER WRIGHT-PATTERSON AFB OH
Supplementary Note:
Trans. of Zhejiang Daxue Xuebao (China) v23 n3 p399-406, May 89.
Annotation:
Thickness Distribution Measurement of Thin Films. --Translation.
Pagination:
0017

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
NAIC-ID(RS)T-0751-94
Monitor Series:
NAIC*
 Subject Terms
Communities of Interest:
Advanced Electronics
Descriptor(s):
*THICKNESS, *THIN FILMS, DISTRIBUTION, COMPARISON, REFRACTIVE INDEX, ZINC SULFIDES, SUBSTRATES, DIELECTRIC FILMS, FABRY PEROT INTERFEROMETERS, TRANSLATIONS, CALIBRATION, MAGNESIUM COMPOUNDS, CHINA, OPTICAL FILTERS, CHINESE LANGUAGE, SODIUM COMPOUNDS
Field(s)/Group(s):
Electrical and Electronic Equipment, Optics
Keyword(s):
FOREIGN REPORTS
Report Date:
1995 May 05