Development of Nanostructure Fabrication Technology and New Electron-Quantum Wave Devices

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Abstract:

Under the three-year grant, we have investigated and developed various nanofabrication technologies including construction of an ultra-high resolution electron beam lithography system, sub-20 nm electron beam lithography techniques, etching of sub-40 nm silicon pillars and ridges b fabricated various nanoscale transistors including a number of new device structures c studied quantum effects and single electron effects d designed, fabricated, and investigated ultra-fast metal-semiconductor-metal photodetectors with the record speeds on various of semiconductors, including low-temperature GaAs with 510 GHz bandwidth, bulk GaAs with 300 GHz, and bulk Si with 75 GHz.

Author(s):
Chou, Stephen Y. ; Fischer, Paul B. ; Fischer, P. B. ; Wang, Yun ; Liu, Yue ; Hsiang, Thomas Y. ; Alexandrou, Sotiris ; Sobolewski, R. ; Liu, Mark Y. ; Khalil, W. ; Wang, Chia-chi
Author Organization(s):
MINNESOTA UNIV MINNEAPOLIS DEPT OF ELECTRICAL ENGINEERING
Descriptive Note:
Final rept. 1 Apr 1990-31 Mar 1993
Pagination:
0021

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release; Distribution Is Unlimited.

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
ARO-27578.7-EL
Contract/Grant Number(s):
DAAL03-90-G-0058
Monitor Series:
27578.7-EL, ARO
 Subject Terms
Joint Capability Areas:
JCA_1.2.3_Educating; JCA_4.6_Engineering; JCA_1.2.7_Experimentation; JCA_4.1_Deployment and Distribution; JCA_5_Command and Control; JCA_5.2.2_Develop Knowledge and Situational Awareness; JCA_5.2_Understand
Modernization Areas:
Microelectronics
Communities of Interest:
No COI(s) Identified
Descriptor(s):
*STRUCTURES, *FABRICATION, *LITHOGRAPHY, *ELECTRON BEAMS, *QUANTUM ELECTRONICS, *TRANSISTORS, VELOCITY, METALS, GALLIUM ARSENIDES, SEMICONDUCTOR DEVICES, HIGH RESOLUTION, ETCHING, SILICON, BANDWIDTH, PHOTODETECTORS, WAVES
Field(s)/Group(s):
Electrical and Electronic Equipment, Printing and Graphic Arts, Particle Accelerators, Quantum Theory and Relativity
Keyword(s):
*QUANTUM EFFECT DEVICES, *QUANTUM WAVE DEVICES, *NANOSTRUCTURES, SINGLE ELECTRON TRANSISTORS, HIGH SPEED, ULTRAHIGH RESOLUTION, PILLARS, RIDGES(ELECTRONICS)
Report Date:
1994 Feb 15