Analysis of Cost: CVD Diamond Deposition and Finishing

IBIS Associate has updated its predictive spreadsheet models of the CVD diamond film finishing technologies, and has solicited expert review for the DC arcjet, microwave, and finishing models. This report presents the results obtained with the new models and revised sets of baseline inputs for diamond heat sink manufacture. For this report and the results contained herein, it is assumed that the regressions which estimate CVD diamond removal rates for the CVD Diamond Finishing model closely predict the actual removal rates for the technologies studied and that the input values for variable such as machine capacity are physically achievable. The CVD diamond planarizing method of excimer laser ablation has been analyzed, and expert review conducted. This finishing process is low cost 220wafer in comparison to the technologies analyzed to date lapping 997wafer, oxygen plasma etching 1,254wafer, and oxygen ion milling 7,698wafer Only hot iron diffusion 144wafer is cost competitive with laser ablation for the assumed baseline conditions. For the laser ablation technology, the significant cost factors are related to the equipment costs, comprised of equipment, tooling, and maintenance, which constitute 24.8, 25.0 and 11.4 of the cost respectively. In the case study analysis, the requirements for the finishing technologies are the removal of 111 micrometers mu of diamond thickness and that the technology achieve thermal management surface roughness specifications which, according to experts, ranges from 0.1 mu to 1 mu in height variation.