Photoelectrochemistry of Electronic and Electro-Optical Materials

reportActive / Technical Report | Accession Number: ADA256239 | Open PDF

Abstract:

The broad objective of this work is to investigate applications of photoelectrochemistry to semiconductor and electro-optical technology. Experiments are being undertaken to understand the functions of reaction velocity and crystallographic orientation in determining profiles and morphologies of photoelectrochemically etched features in Si, SiC and III-V compounds. Work was also conducted to determine the relationship between liquid junction response and solid state diode electrical characteristics of the polar faces of III-V crystals and to develop chemical surface passivants for compound semiconductor device electronics. Gratings, Etching, Photoelectrochemistry, Semiconductor, Processing, GaAs, Sic.

Author(s):
Rauh, R. D.
Author Organization(s):
EIC LABS INC NORWOOD MA
Descriptive Note:
Final rept. 1 Mar 1987-30 Sep 1989
Pagination:
0005

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release; Distribution Is Unlimited.

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
C912F
Contract/Grant Number(s):
N00014-87-C-0408
Monitor Series:
ONR
 Subject Terms
Modernization Areas:
Microelectronics; Directed Energy
Communities of Interest:
Advanced Electronics
Descriptor(s):
*ELECTRONICS, *SEMICONDUCTOR DEVICES, VELOCITY, DIODES, REACTION KINETICS, LIQUIDS, GALLIUM ARSENIDES, CRYSTALS, PHOTORESIST COATINGS, ELECTRODES, RESPONSE, OXIDES, PROFILES, GRATINGS(SPECTRA), SURFACES, ELECTRICAL PROPERTIES, ETCHING, SOLIDS, SULFIDES, SILICON CARBIDES, JUNCTIONS, WORK, PHOTONS, SILICON, SEMICONDUCTORS, ELECTROCHEMISTRY, MORPHOLOGY, PROCESSING, CHEMICALS, METALS, FUNCTIONS
Field(s)/Group(s):
Physical Chemistry, Radiation and Nuclear Chemistry, Electrical and Electronic Equipment, Electrooptical and Optoelectronic Devices
Keyword(s):
*PHOTOELECTROCHEMISTRY, *ELECTRO OPTICAL MATERIALS, POLAR FACES, PASSIVANTS, GROOVE ANGLES, FERMI LEVEL PINNING, SOLID STATE DEVICES
Report Date:
1992 Sep 01