Semiconductor Diamond Technology

reportActive / Technical Report | Accession Number: ADA233085 | Open PDF

Abstract:

This report surveys the progress in a number of research activities pursued this quarter at Research Triangle Institute. Gas phase analysis in diamond producing charges, Determination of substrate effects on the growth of homoepitaxial diamond, F2CH4 gas interactions as a function of temperature, Hydrogen-halogen exchange reactions, Fabrication and testing of a diamond IGFET, and investigation of LiF as an in-situ dopant for diamond. These parallel efforts are designed to advance the state-of-the-art in semiconducting diamond technology. These efforts are encompassing development of doping and fabrication techniques for diamond devices while they are also developing novel deposition technique targetting successful heteroepitaxial growth. Author

Author(s):
Markunas, R. J. ; Rudder, R. A. ; Posthill, J. B. ; Thomas, R. E.
Author Organization(s):
RESEARCH TRIANGLE INST (RTI) RESEARCH TRIANGLE PARK NC
Descriptive Note:
Quarterly rept. no. 3, 1 Jul-30 Sep 1990
Pagination:
0050

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release; Distribution Is Unlimited.

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
RTI/3629/90
Contract/Grant Number(s):
N00014-86-C-0460
Monitor Series:
NRL
 Subject Terms
Joint Capability Areas:
JCA_5.3_Planning; JCA_5_Command and Control; JCA_1.2.7_Experimentation; JCA_4.5.4_Requirements Definition; JCA_4.5_Operational Contract Support
Modernization Areas:
Microelectronics
Communities of Interest:
Advanced Electronics
Descriptor(s):
*METHODOLOGY, GAS ANALYSIS, REPORTS, FABRICATION, DIAMONDS, EPITAXIAL GROWTH, SUBSTRATES, SEMICONDUCTORS, VAPOR PHASES, DEPOSITION, SURVEYS, TARGETING, DOPING, TRIANGLES, GROWTH(GENERAL)
Field(s)/Group(s):
Electrical and Electronic Equipment, Crystallography
Keyword(s):
*DIAMONDS, *EPITAXIAL GROWTH, FIELD EFFECT TRANSISTORS, DOPING
Report Date:
1991 Mar 01