A Cryocooler for High Acceleration Applications

reportActive / Technical Report | Accession Number: ADA223618 | Open PDF

Abstract:

Repairs to the sputtering system have been completed and the system is operable. The replaced oscillator tube delivers significantly more power than the previous tube, which is normally advantageous due to higher sputtering rates. However, in our particular application, this increased power is resulting in dissociation of the oxide which are to be sputtered. Optimization of the sputtering conditions to obtain the required oxide film is currently underway.

Author(s):
Nilles, Michael J.
Author Organization(s):
ALABAMA CRYOGENIC ENGINEERING HUNTSVILLE
Descriptive Note:
Quarterly rept. no. 7, 15 Mar 1989-14 Jun 1990
Pagination:
0002

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release; Distribution Is Unlimited.

RECORD

Collection: TR
Identifying Numbers
Contract/Grant Number(s):
N00014-88-C-0571
 Subject Terms
Communities of Interest:
Energy and Power Technologies
Descriptor(s):
*REFRIGERATION SYSTEMS, *ELECTRON TUBES, *SPUTTERING, FILMS, REPAIR, DISSOCIATION, CRYOGENICS, HIGH ACCELERATION, HIGH RATE, OPTIMIZATION, OSCILLATORS, OXIDES
Field(s)/Group(s):
Air Conditioning, Heating, Lighting and Ventilating, Manufacturing and Industrial Engineering and Control of Production Systems, Test Facilities, Equipment and Methods
Report Date:
1990 Jun 25