Depth Profiles and Bulk Analysis of Semiconductor Materials Using ICP mass Spectroscopy with Electrothermal Atomization

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Abstract:

The purpose of the contract was to build the equipment necessary to show technical feasibility of a Demand Modulated Electrothermal Atomization System. This system was thought to have advantages over current technology as follows 1 Prevents excessive analyte concentrations in the plasma giving the analyst control over matrix suppression effects. 2 Allows the analyst to control atomization rates and avoid buildup of deposits in the throat of the sample cone opening. 3 Allows the analyst to work in the optimum counting range for isotropic ratio work regardless of concentration variations. 4 Allows the data to be taken over the temperature dimension, thus resolving isobaric interferences as well as improving the signal to noise ratio resulting in improved detection limits across the entire mass range.

Author(s):
Faulkner, William ; Henderson, William ; Rogers, Michael
Author Organization(s):
GEOCHEMICAL SERVICES INC TORRANCE CA
Descriptive Note:
Final technical rept. Jul 1986-Mar 1987
Pagination:
0090

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release; Distribution Is Unlimited.

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
RADC-TR-88-218
Contract/Grant Number(s):
F19628-86-C-0122
Task Number(s):
RA
Project Number(s):
3005
Monitor Series:
TR-88-218, RADC
 Subject Terms
Joint Capability Areas:
JCA_5_Command and Control; JCA_5.3_Planning; JCA_6_Net Centric; JCA_6.3.3_Spectrum Management; JCA_6.4.1_Secure Information Exchange; JCA_1_Force Support; JCA_6.1.3_Switching and Routing; JCA_6.2.1_Information Sharing; JCA_6.2.2_Computing Services; JCA_1.2_Force Preparation; JCA_6.3_Net Management; JCA_6.4_Information Assurance; JCA_1.2.6_Concepts; JCA_6.1_Information Transport; JCA_6.2_Enterprise Services; JCA_3.2_Engagement; JCA_3_Force Application; JCA_4.3_Maintain; JCA_8_Building Partnerships
Modernization Areas:
Microelectronics
Communities of Interest:
Energy and Power Technologies
Descriptor(s):
*ATOMIZATION, *MASS SPECTROMETRY, *MASS SPECTROSCOPY, *PLASMAS(PHYSICS), *COUPLING(INTERACTION), *THERMOELECTRICITY, SIZES(DIMENSIONS), MATERIALS, MASS, SIGNAL TO NOISE RATIO, COUNTING METHODS, RATES, SEMICONDUCTORS, DEPTH, PROFILES, FEASIBILITY STUDIES, LIMITATIONS, ISOTROPISM, CONICAL BODIES, THROAT, OPENING(PROCESS), CONTRACTS, DETECTION, OPTIMIZATION, TEMPERATURE, RATIOS, CONTROL
Field(s)/Group(s):
Physical Chemistry, Test Facilities, Equipment and Methods
Keyword(s):
*INDUCTIVELY COUPLED PLASMA, SEMICONDUCTOR ANALYSIS, DEPTH PROFILE, MASS SPECTROMETRY, ELECTROTHERMAL ATOMIZATION, INDUCTIVELY COUPLED PLASMA, PE65502F, WURADC3005RA52
Report Date:
1988 Oct 01