Electronic Materials and Devices Prepared by Molecular Beam Epitaxy.

reportActive / Technical Report | Accession Number: ADA195694 | Open PDF

Abstract:

Six Perkin Elmer 430P III-V MBE Systems and a PE Si MBE with appropriate transfer tubes for a totally interconnected MBE Complex has been purchased and installation has begun. The complex is located in the Coordinated Science Laboratory in Room 200 with the majority of administrative role being played by MRL. In this complex, two III-V MBE systems and a transfer tube 13 feet long and the associated assortment of equipment has been paid for by funds obtained from AFOSR. These growth chambers have been termed as Growth Reactors A B, with the transfer tube being called 1 Tube. The systems are presently in CSL Room 200 which has been remodeled for this purpose and we are in the process of installing them. Epitaxial growth, Molecular beams. mjm

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