Chemical Cleaning of Metal Surfaces in Vacuum Systems by Exposure to Reactive Gases.
Abstract:
Chemical surface cleaning procedures for metals using oxidationreduction cycles by exposure to oxidizing oxygen, nitric oxide and reducing Hydrogen, Ammonia gases are summarized and are briefly discussed for iron, nickel, palladium, copper and silver surfaces. We also present data on the reduction of gaseous contaminants in a stainless steel UHV system by flowing nitric oxide through the system during bake-out Keywords Vacuum chambers.
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