Thin Film Measurements,

The problems of the vacuum air shift have been further studied in both laboratories. Single films and multilayers of different materials, classically evaporated as well as ion assisted have been studied and the improvement in stability with ion assisted deposition has been further confirmed. Much emphasis is being given to microstructural effects in layers and another aspect of film properties depending largely on structure is anisotropy. Here a series of measurements have been made that demonstrate the influence of the columnar structure of the layers on their optical properties. This work began with investigations by Horowitz of principally zirconium dioxide and titanium dioxide using a modified ellipsometric method of measurement and continued with guided wave measurements in Marseille. Many more measurements have been added to the data base. Scattering of single layers and of multilayers has been an important topic of invesigation. An attempt has begun at a correlation between the measurements of the scattering diagram and the structural details of the layers, which are a consequence of the growth process. The theory developed in Marseille of the scattering effect calculates the scattering diagram from the statistical properties of the layers and in particular of their surfaces. The theoretical atomistic modeling of the growth process has been adapted so that it yields statistical information similar to that required by the theory. The next step is to attempt a closer correlation between these theoretical model results and the results of direct measurement.