Cryogenic Sample Stage for the CAMECA IMS-3f Ion Microscope.

Bernius, M. T.; Chandra, S.; Morrison, G. H.

Cryogenic Sample Stage for the CAMECA IMS-3f Ion Microscope.

Active / Technical Report | Accession Number: ADA158071 |

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Abstract:

A liquid nitrogen cooled sample stage for use with the CAMECA-IMS-3F ion microscope has been designed, built and incorporated into the existing laboratory instrumentaton for SIMS analysis of samples at cryogenic temperatures. This is particularly useful for the ion microscopic analysis of frozen hydrated samples biologicals, and the study of sputter and ion yields of materials in a water matrix. The application to semiconductor analysis is being explored. Keywords Secondary Ion Mass Spectrometry SIMS Ion microscopy Cryogenic Laboratory technique Instrumentation Frozen hydrated samples.

Author(s):

Bernius, M. T. ; Chandra, S. ; Morrison, G. H.

Author Organization(s):

CORNELL UNIV ITHACA NY BAKER LAB

Descriptive Note:

Interim technical rept.,

Pagination:

0007

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:

Approved For Public Release

RECORD

Collection: TR

Identifying Numbers

Report Number(s):

TR-14

Contract/Grant Number(s):

N00014-80-C-0538

Subject Terms

Joint Capability Areas:

JCA_5_Command and Control; JCA_5.3_Planning; JCA_1.2_Force Preparation; JCA_1_Force Support

Modernization Areas:

Microelectronics

Communities of Interest:

Weapons Technologies

Descriptor(s):

*MASS SPECTROSCOPY, *MICROSCOPY, IONS, TEMPERATURE, WATER, MATERIALS, SECONDARY, SEMICONDUCTORS, FREEZING, SAMPLING, YIELD, LABORATORY PROCEDURES, LIQUID NITROGEN, SPUTTERING, CRYOGENICS, BIOLOGICAL PRODUCTS, HYDRATION

Field(s)/Group(s):

Atomic and Molecular Physics and Spectroscopy

Keyword(s):

SIMS(Secondary Ion Mass Spectrometry), Ion microscopy, Frozen samples, Hydrated samples, WUNR051736

Report Date:

1985 Jul 17