Silazane Precursors to Silicon Nitride.

reportActive / Technical Report | Accession Number: ADA146791 | Open PDF

Abstract:

Pyrolysis of the liquid, organic-soluble ammonolysis product of dichlorosilane in a nitrogen atmosphere gives silicon nitride in 70 yield. Ammonia and disilylamine are the volatile products which are given off. Also studied has been the ammonolysis of methyldichlorosilane. Preliminary studies of the conversion of the CH3SiHCl2 ammonolysis product to ceramic materials are reported. Author

Author(s):
Seyferth, D. ; Wiseman, G. H.
Author Organization(s):
MASSACHUSETTS INST OF TECH CAMBRIDGE DEPT OF CHEMISTRY
Descriptive Note:
Technical rept.,
Pagination:
0013

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
TR-15
Contract/Grant Number(s):
N00014-82-K-0322
 Subject Terms
Joint Capability Areas:
JCA_6.3.3_Spectrum Management; JCA_1.2_Force Preparation; JCA_1_Force Support; JCA_1.2.3_Educating; JCA_6.3_Net Management; JCA_6_Net Centric; JCA_5_Command and Control; JCA_5.3_Planning; JCA_4.6_Engineering; JCA_1.2.7_Experimentation
Modernization Areas:
Microelectronics
Communities of Interest:
Advanced Electronics
Descriptor(s):
*PYROLYSIS, *SILICON NITRIDES, NITROGEN, AMMONIA, CERAMIC MATERIALS, AMINES, VOLATILITY, ATMOSPHERES, CHLOROSILANES
Field(s)/Group(s):
Organic Chemistry, Physical Chemistry, Ceramics, Refractories and Glass
Keyword(s):
Ammonolysis, Dichlorosilane, Polysilazanes, Disilylamine, WUNR631618
Report Date:
1984 Oct 10