Research in VLSI Systems.

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Abstract:

The parametric test facility provides two essential support functions for the Fast Turn-Around Laboratory - feedback of process-control information to the fabrication line, and characterization of active devices and parasitics for circuit design. The basic parametric tester, consisting of a Rucker and Kolls model 1032 stepping wafer prober, an HP 4145 semiconductor parameter analyzer, and an HP 6942A switching matrix controlled by an HP 9845 calculator, has been upgraded by addition of an HP 3456 system, DVM, an HP 5316 frequency counter, and an HP 4271 capacitance bridge. The DVM gives increased system flexibility while the frequency coutner provides for the direct measurement of ring oscillator performance. Custom hardware has been designed and built for the rapid extraction of MOS transistor threshold and capacitor breakdown voltages. The system includes the necessary software to measure such process control parameters as line widths, sheet resistances, and threshold and breakdown voltages. Software has also been developed for the statistical analysis of these data on the HP 9845 computer. This software can produce maps of parameter variations across a wafer as well as the usual means, standard deviations, and histograms. Author

Author(s):
No Author(s) Identified
Author Organization(s):
STANFORD UNIV CA
Descriptive Note:
Technical progress rept.
Supplementary Note:
Sponsored in part by Contracts MDA903-80-C-0432 and MDA903-80-C-0107.
Pagination:
0007

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Contract/Grant Number(s):
MDA903-79-C-0680, MDA903-83-C-0335
 Subject Terms
Modernization Areas:
Microelectronics
Communities of Interest:
Advanced Electronics
Descriptor(s):
*Microelectronics, *Integrated circuits, *Parametric analysis, Test methods, Performance(Engineering), Solid state electronics, Chips(Electronics), Breakdown(Electronic threshold), Voltage, Capacitors, Computer aided design, Minicomputers
Field(s)/Group(s):
Electrical and Electronic Equipment
Keyword(s):
*VLSI(Very Large Scale Integration)
Report Date:
1983 Nov 01