SAW (Surface Acoustic Wave) Resonator and Reflective Array Devices.

This report documents the engineering effort applied during this Manufacturing Methods and Technology MMT contract on two distinct SAW devices using grooved reflective arrays on two different piezoelectric substrate materials. One device is 60 MHz by 60 microsecond down chirp linearly-dispersive filter operating at 200 MHz using lithium niobate and the second device is a two-part, 100 KHz bandwidth resonator operating at 400 MHz using quartz. The reflective is formed by an ion beam etch process. The degree of time-linearity on the RAC filter was achieved by use of metallic phase correction patterns. With a common pattern, wth phase error was reduced to about 18 degrees RMS with a second correction pattern designed for each individual RAC, the phase error was further reduced to about 7 degrees RMS. The corresponding sidelobe levels in the time-domain pulse compression loop using an ideal matched filter were 25 and 32 dB, respectively. Author