E Beam: An Operating System for Particle Beam Lithography.
Abstract:
A modular suite of subroutines, designed to provide an operating environment for the RSRE Beam Lithography Machine EBLM-1 is described. The suite EBEAM will run on any PDP-11 16-bit minicomputer with sufficient memory under the RT11 or RSX-11M operating systems. Module names, peripheral addresses and instructions for installation and operation under both operating systems are given together with detailed descriptions of available commands and a list of error messages with possible causes and remedies. This memorandum is intended to be a general introduction and guide to users wishing to install and operate such a system. It does not give detailed descriptions of the individual modules and algorithms or of the hardware, as these are described elsewhere. Author