Etching Studies on Singly and Doubly Rotated Quartz Plates

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Abstract:

Experiments aimed at finding a chemical polish for the doubly rotated SC-cut have been performed with a variety of etchants. The surface morphologies of etched SC-cut plates depend strongly on the composition of the etching solutions. Some of the solutions evaluated did not produce chemical polishing on either side of the SC-cut plates, some produced chemical polishing on one side but not the other, and some were able to polish both sides. It has also been shown that at least up to 10 MHz, the chemical polishing does not produce a significant 0 degradation for AT-cut quartz crystal resonators.

Author(s):
Vig, John R. ; Brandmayr, Ronald J. ; Filler, Raymond L.
Author Organization(s):
ARMY ELECTRONICS RESEARCH AND DEVELOPMENT COMMAND FORT MONMOUTH NJ ELECTRONICS TECHNOLOGY/DEVICES LAB
Descriptive Note:
Research and development rept.
Supplementary Note:
Presented at the Annual Symposium on Frequency Control (33rd), 30 May-1 Jun 79, Atlantic City, NJ.
Pagination:
0013

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
DELET-TR-80-5
Task Number(s):
10
Project Number(s):
1L162705AH94
Monitor Series:
DELET
 Subject Terms
Joint Capability Areas:
JCA_1.2.7_Experimentation; JCA_1.2.5_Lessons Learned; JCA_6_Net Centric
Modernization Areas:
Microelectronics
Communities of Interest:
Biomedical
Descriptor(s):
*ETCHING, *QUARTZ, *PLATES, *SURFACE CHEMISTRY, *POLISHING, EXPERIMENTAL DATA, SOLUTIONS(MIXTURES), SURFACE ROUGHNESS, CHEMICAL COMPOSITION, ELECTRON MICROSCOPY, AMMONIUM COMPOUNDS, ROTATION, FLUORIDES, QUARTZ RESONATORS
Field(s)/Group(s):
Industrial Chemistry and Chemical Processing, Geology, Geochemistry and Mineralogy, Manufacturing and Industrial Engineering and Control of Production Systems
Keyword(s):
QUARTZ CRYSTALS, ROTATED QUARTZ PLATES, CHEMICAL POLISHING, ETCHING STUDIES, ETCHANTS, AMMONIUM BIFLUORIDES, SURFACE MORPHOLOGIES, SCANNING ELECTRON MICROSCOPY, PE62705A, ASH94
Report Date:
1980 Jan 01