A Computer-Automated Temperature Control System for Semiconductor Measurements.
Abstract:
A computer-automated temperature control system is described in this report to completely automate data acquisition for the characterization of electrical properties of semiconductor devices and materials. Temperature is monitored by a type T thermocouple embedded in a heat sink surrounding the sample. Liquid nitrogen provides a reference temperature for the thermocouple. Steady state is established by computer control of the current in a heater wire wrapped around a block of copper on which the solid state device is mounted. A proportional plus integral control is implemented as a computer.
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