Program to Design, Develop, Fabricate and Deliver Thin Film Chip Inductors Suitable for Hybrid Circuit Applications.
Abstract:
Inductors were fabricated using thin film techniques. The winding of an inductor was formed by depositing alternate layers of metal and dielectric material in steps of one-half turns. The optimization of Q-factor and self-resonant frequency were discussed. Comparison of circular and square geometry were made indicating that the circular one was preferred. Use of magnetic ferrite substrate to increase the inductance and the Q-factor has been achieved. Different methods for the measurements of inductance and Q-factor were described and the results of the measurement of a thin film inductor were given. Author
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