SUPREM II -- A Program for IC Process Modeling and Simulation.

reportActive / Technical Report | Accession Number: ADA058473 | Open PDF

Abstract:

SUPREM II is the second version of the IC process simulation program, SUPREM. Several modifications and refinements relative to SUPREM I 1 have been implemented but the basic program architecture and IO philosophy has not been altered. The input language syntax remains the same, but various semantic changes have been made mainly to accommodate the new or improved physical models used in SUPREM II. This report consists of three parts. In the main part the physical process models and their numerical implementation in SUPREM II are described. Also, some details of the program and data structure are discussed. The second part contains the SUPREM II operating manual valid at the time of the program release. The last part of the report consists of a set of examples of program usage in multi-step process simulation together with some of the resulting outputs.

Author(s):
Antoniadis, Dimitri A. ; Hansen, Stephen E. ; Dutton, Robert W.
Author Organization(s):
STANFORD UNIV CALIF STANFORD ELECTRONICS LABS
Descriptive Note:
Technical rept.,
Pagination:
0121

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release, Document Partially Illegible
Distribution Statement:
Availability: Document Partially Illegible.

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
SU-SEL-78-020, TR-5019-2
Contract/Grant Number(s):
DAAG-29-77-C-0006
Monitor Series:
14589.2-EL
 Subject Terms
Joint Capability Areas:
JCA_1_Force Support; JCA_JCA_4.1.2_Sustain the Force; JCA_4.1_Deployment and Distribution; JCA_5_Command and Control; JCA_1.2_Force Preparation; JCA_1.3_Human Capital Management; JCA_1.4.2_Health Service Delivery; JCA_1.4_Force Support; JCA_5.3_Planning; JCA_1.3.2_Personnel Management; JCA_1.2.3_Educating; JCA_3.2_Engagement; JCA_3_Force Application; JCA_4.4.1_Food Service; JCA_4.4_Logistics Services; JCA_3.2.1_Kinetic Means
Modernization Areas:
Microelectronics
Communities of Interest:
Advanced Electronics
Descriptor(s):
*COMPUTERIZED SIMULATION, *INTEGRATED CIRCUITS, COMPUTER PROGRAMS, COMPUTER ARCHITECTURE, INPUT OUTPUT PROCESSING, EPITAXIAL GROWTH, IMPURITIES, ION IMPLANTATION, MATHEMATICAL ANALYSIS, DATA REDUCTION, FORMATS, COMPUTER GRAPHICS, DIFFUSION COEFFICIENT, NUMERICAL METHODS AND PROCEDURES, SYNTAX
Field(s)/Group(s):
Computer Programming and Software, Computer Hardware
Keyword(s):
SUPREM II computer program, SUPREM computer program
Report Date:
1978 Jun 01