Semiconductor Microelectronics,

The preface and introduction briefly describe the stages of development of miniaturization in radioelectronics equipment outside the USSR, including circuit densities, production volume and costs. Various devices for making static and dynamic measurements of integrated circuits, before and after encapsulation, with computer processing of measurements and, in recent models, computer control of the test unit, installed on the assembly line, are discussed and illustrated. Characteristics, productivity and types of measurements made are presented for two Sylvania Company systems, the Fairchild Company series, and three Westinghouse systems, two of which use a scanning electron microscope under computer control and one of which uses the electron microprobe.