The Structure and Properties of Amorphous Indium Oxide

reportActive / Technical Report | Accession Number: AD1094083 | Open PDF

Abstract:

A series of In2O3 thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-to-crystalline transition and the structure of amorphous In2O3 were investigated by grazing angle X-ray diffraction GIXRD, Hall transport measurement, high resolution transmission electron microscopy HRTEM, electron diffraction, extended X-ray absorption fine structure EXAFS, and ab initio molecular dynamics MD liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOx polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structureproperty relationship.

Author(s):
Buchholz, D. B. ; Ma, Qing ; Alducin, Diego ; Ponce, Arturo ; Jose-yacaman, Miguel ; Khanal, Rabi ; Medvedeva, Julia E. ; Chang, Robert P.
Author Organization(s):
University of Texas at San Antonio San Antonio United States
Descriptive Note:
Journal Article - Open Access
Supplementary Note:
Chemistry of Materials , 26, 01 Jan 0001, 01 Jan 0001,
Pagination:
0014

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release;

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
ARO-64756-MS-REP.4
Monitor Series:
ARO-64756-MS-REP.4
 Subject Terms
Joint Capability Areas:
JCA_5_Command and Control; JCA_5.3_Planning; JCA_1.2.5_Lessons Learned; JCA_1.2.3_Educating; JCA_JCA_4.1.2_Sustain the Force; JCA_4.1_Deployment and Distribution
Modernization Areas:
Microelectronics
Communities of Interest:
Advanced Electronics
Descriptor(s):
electron diffraction, oxides, indium compounds, thin films, X ray diffraction, transmission electron microscopy, first principles calculations, molecular dynamics
Field(s)/Group(s):
Electrical and Electronic Equipment, Inorganic Chemistry, Atomic and Molecular Physics and Spectroscopy
Keyword(s):
indium oxides, tco (transparent conducting oxide), gixrd (grazing angle X ray diffraction), Hall transport measurement, hrtem (high resolution transmission electron microscopy), exafs (extended X ray absorption fine structure), md (molecular dynamics), MD liquid quench simulation, transport properties, structure property relationships, tos (Transparent oxide semiconductors), a tco (Amorphous TCO)
Report Date:
2014 Sep 02
Creation Date:
2020 Mar 26