Detailed Alignment Procedure for the JEOL 2010F Transmission Electron Microscope

reportActive / Technical Report | Accession Number: AD1043155 | Open PDF

Abstract:

The transmission electron microscope TEM allows lattice-resolution imaging of specimens. At ARL, we rely on TEM imaging for detailed structural characterization. Typical experiments involve examining the crystalline structure, interface quality, and defect morphology of semiconductor materials. The TEM consists primarily of an electron gun, electromagnetic lenses, apertures, stigmators, deflectors, and a viewing system. The alignment affects the propagation of the beam down the column and its interaction with the specimen and lenses. This in turn affects the quality of the image and the ease of obtaining it. This report discusses the alignment procedure for the JEOL 2010F TEM.

Author(s):
Sarney, Wendy
Author Organization(s):
US Army Research Laboratory Adelphi United States
Descriptive Note:
Technical Report,01 Jan 2004,01 Jul 2004
Pagination:
0015

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release
Distribution Statement:
Approved For Public Release;

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
ARL-MR-603
Monitor Series:
ARL-MR-603
 Subject Terms
Joint Capability Areas:
JCA_6.1.3_Switching and Routing; JCA_6_Net Centric; JCA_6.1_Information Transport; JCA_6.4.1_Secure Information Exchange; JCA_6.4_Information Assurance; JCA_8_Building Partnerships
Modernization Areas:
Directed Energy
Communities of Interest:
Advanced Electronics
Descriptor(s):
Transmission Electron Microscopy, imaging techniques, HIGH RESOLUTION, alignment, optical lenses, deflectors
Field(s)/Group(s):
Test Facilities, Equipment and Methods
Keyword(s):
high resolution imaging, alignment procedures
Report Date:
2004 Dec 01
Creation Date:
2018 Feb 12