A Flexible Ultra-High Vacuum R and D System.

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Abstract:

An ultra-high vacuum system for 10 to the minus 11 and 12 power torr operational range has been designed and constructed. The high degree of flexibility inherent in the system design makes maximum use of the pump system and operational space for this task and for future projects. Author

Author(s):
Gentner, K.
Author Organization(s):
NAVAL AIR DEVELOPMENT CENTER WARMINSTER PA AERO-ELECTRONIC TECHNOLOGY DEPT
Descriptive Note:
Phase rept.,
Pagination:
0023

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
NADC-AE-6935
Project Number(s):
NADC-IR-ZR011-01-01/EY-6-04
 Subject Terms
Communities of Interest:
No COI(s) Identified
Descriptor(s):
(*METAL FILMS, DEPOSITION), (*VACUUM APPARATUS, DESIGN), (*SPUTTERING, VACUUM APPARATUS), MATERIALS, IMPURITIES, RARE GASES, MANUFACTURING, ELECTROOPTICS, VACUUM PUMPS, MICROELECTRONICS
Field(s)/Group(s):
Manufacturing and Industrial Engineering and Control of Production Systems, Test Facilities, Equipment and Methods
Keyword(s):
RESEARCH AND DEVELOPMENT, THICK FILMS, THIN FILMS
Report Date:
1970 Feb 04