Application of Thin Films in Electronics,

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Abstract:

The article reviews the application of thin films produced by vacuum evaporation, cathode sputtering, diffusion and epitaxial growing in the field of passive and active electric components and in microminiaturization. Some of the characteristics of thin films are summarized. Author

Author(s):
Boros-gyevi, J. ; Motal, G.
Author Organization(s):
FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OH
Supplementary Note:
Edited trans. of Finommechanika (Hungary) v6 n5 p143-150 1967, by D. Grandjean.
Annotation:
Application of Thin Films in Electronics--Translation.
Pagination:
0026

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
FTD-HT-23-73-68
 Subject Terms
Communities of Interest:
Advanced Electronics
Descriptor(s):
(*MINIATURE ELECTRONIC EQUIPMENT, METAL FILMS), SEMICONDUCTOR DEVICES, SINGLE CRYSTALS, EPITAXIAL GROWTH, SURFACE PROPERTIES, HUNGARY
Field(s)/Group(s):
Electrical and Electronic Equipment, Crystallography
Keyword(s):
METAL OXIDE SEMICONDUCTORS, THIN FILMS, TRANSLATIONS
Report Date:
1968 Apr 25