Applications of Thin Films in Electronics,

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Abstract:

The authors review the application of thin films produced by vacuum vaporization, cathode sputtering, diffusion, and epitaxial growing in the fields of passive and active electric components and microminiaturization. Some of the most important characteristics of thin films are summarized. Author

Author(s):
Boros-gyevi, J. ; Motal, G.
Author Organization(s):
FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OH
Supplementary Note:
Edited trans. of Finommechanika (Hungary) v6 n3 p85-89 1967, by D. Grandjean.
Annotation:
Applications of Thin Films in Electronics--Translation.
Pagination:
0019

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
FTD-HT-23-88-68
 Subject Terms
Communities of Interest:
Advanced Electronics
Descriptor(s):
(*METAL FILMS, MANUFACTURING), EPITAXIAL GROWTH, ELECTRICAL PROPERTIES, SUBMINIATURE ELECTRICAL EQUIPMENT, RESISTORS, CERMETS, THERMAL PROPERTIES, CAPACITORS, VACUUM APPARATUS, VAPOR PLATING, HUNGARY, TANTALUM COMPOUNDS, MICROELECTRONICS
Field(s)/Group(s):
Ceramics, Refractories and Glass, Metallurgy and Metallography
Keyword(s):
*THIN FILMS, TRANSLATIONS
Report Date:
1968 Apr 04