PIEZOELECTRIC THIN FILM TRANSDUCERS.
Abstract:
The methods by which CdS vapor deposition procedures and equipment have been improved are discussed. Techniques for multilayer transducers are described, together with microwave acoustic attenuation measurements on various dielectric and semiconductor materials. A method of modifying a standard evaporator for CdS film fabrication is given. Film thickness measurement procedures are reviewed and theoretical discussions are included to account for the attenuation measurements made. Author
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