PRODUCTION ENGINEERING MEASURE FOR SILICON SWITCHING TRANSISTORS.

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Abstract:

Efforts were continued on a program to establish a production capability for a silicon NPN micropower switching transistor, type EL-2NX-10. Work centered about finalization of material, diffusion, and probe specifications for the preproduction and production diffusion runs. Devices built to supply the final engineering sample have demonstrated the capability to produce both preproduction and producrion quantities. Additional processing work resulted in photoresist processing being improved by the addition of infrared procedures, contact metallization being improved by the revision of two cleaning procedures, and greater parameter stability being provided by the revision of assembly atmospheres.

Author(s):
Siegel, Mark ; Freese, Jack
Author Organization(s):
MOTOROLA INC PHOENIX AZ SEMICONDUCTOR GROUP
Descriptive Note:
Quarterly progress rept. no. 5, 25 May-25 Aug 66,
Pagination:
0022

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
M-34
Contract/Grant Number(s):
DA-36-039-AMC-06164(E)
 Subject Terms
Joint Capability Areas:
JCA_6.1.3_Switching and Routing
Communities of Interest:
Advanced Electronics
Descriptor(s):
*MANUFACTURING), (*TRANSISTORS, SILICON, DIFFUSION, ETCHING, PHOTOENGRAVING, MICROELECTRONICS, PROCESSING, CLEANING, ELECTRODES, PROBES, MASKING
Field(s)/Group(s):
Electrical and Electronic Equipment, Manufacturing and Industrial Engineering and Control of Production Systems
Keyword(s):
MICROPOWER
Report Date:
1966 Aug 25